Thin layers of titanium dioxide were fabricated by direct inkjet patterning of a reverse micelles sol-gel composition onto soda-lime glass plates. Several series of variable thickness samples were produced by repeated overprinting and these were further calcined at different temperatures. The resulting layers were inspected by optical and scanning electronic microscopy and their optical properties were investigated by spectroscopic ellipsometry in the range of 200-1000 nm. Thus the influence of the calcination temperature on material as well as optical properties of the patterned micellar titania was studied. The additive nature of the deposition process was demonstrated by a linear dependence of total thickness on the number of printed layers without being significantly affected by the calcination temperature. The micellar imprints structure of the titania layer resulted into significant deviation of measured optical constants from the values reported for bulk titania. The introduction of a void layer into the ellipsometric model was found necessary for this particular type of titania and enabled correct ellipsometric determination of layer thickness, well matching the thickness values from mechanical profilometry.

Faculty of Chemistry Brno University of Technology Purkynova 118 Brno 61200 Czech Republic

Institute of Chemical Process Fundamentals of the ASCR Rozvojova 135 Prague 16502 Czech Republic

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