The new extended Monte Carlo (MC) simulation method for photon transport in S(T)EM back scattered electron (BSE) scintillation detection systems of various shapes is presented in this paper. The method makes use of the random generation of photon emission from a scintillator luminescent centre and describes the trajectory of photons and the efficiency of their transport toward the photocathode of the photomultiplier tube. The paper explains a new algorithm for determining the position of interaction of the photon with the surface of the single crystal scintillator or of the light guide with nearly arbitrary shapes. Some examples of the utilization of the simulation method are also included, and conclusions for very simple edge-guided signal (EGS) scintillation detection systems made. The computer optimized design of the BSE scintillation detector for the S 4000 Hitachi SEM was chosen to demonstrate the capability of this MC simulation method.

Institute of Scientific Instruments of the Academy of Sciences of the Czech Republic v v i Department of Electron Optics Brno Czech Republic

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