Spectroscopic ellipsometry applied to phase transitions in solids: possibilities and limitations
Language English Country United States Media print
Document type Journal Article, Research Support, Non-U.S. Gov't
PubMed
19654840
DOI
10.1364/oe.17.014322
PII: 184278
Knihovny.cz E-resources
- MeSH
- Algorithms * MeSH
- Models, Chemical * MeSH
- Computer Simulation MeSH
- Powders chemistry MeSH
- Refractometry methods MeSH
- Spectrum Analysis methods MeSH
- Phase Transition MeSH
- Publication type
- Journal Article MeSH
- Research Support, Non-U.S. Gov't MeSH
- Names of Substances
- Powders MeSH
The possibilities of in situ spectroscopic ellipsometry applied to phase transitions investigation in oxide thin films and crystals are examined in this work, along with the use of various parameters calculated from ellipsometric data (band gap energy Eg, refractive index n and surface roughness) together with the directly measured main ellipsometric angles psi and Delta, for the detection of phase transitions. The efficiency of spectroscopic ellipsometry on "surface" phase transition and its sensitivity to surface defects are also demonstrated.
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