The durability of grazing- and normal-incidence optical coatings has been experimentally assessed under free-electron laser irradiation at various numbers of pulses up to 16 million shots and various fluence levels below 10% of the single-shot damage threshold. The experiment was performed at FLASH, the Free-electron LASer in Hamburg, using 13.5 nm extreme UV (EUV) radiation with 100 fs pulse duration. Polycrystalline ruthenium and amorphous carbon 50 nm thin films on silicon substrates were tested at total external reflection angles of 20° and 10° grazing incidence, respectively. Mo/Si periodical multilayer structures were tested in the Bragg reflection condition at 16° off-normal angle of incidence. The exposed areas were analysed post-mortem using differential contrast visible light microscopy, EUV reflectivity mapping and scanning X-ray photoelectron spectroscopy. The analysis revealed that Ru and Mo/Si coatings exposed to the highest dose and fluence level show a few per cent drop in their EUV reflectivity, which is explained by EUV-induced oxidation of the surface.

ASML Netherlands BV PO Box 324 Veldhoven 5500 AH The Netherlands

Carl Zeiss SMT GmbH Rudolf Eber Strasse 2 Oberkochen 73447 Germany

Deutsches Elektronen Synchrotron DESY Notkestrasse 85 Hamburg 22607 Germany

Helmholtz Zentrum Berlin für Materialien und Energie Albert Einstein Strasse 15 Berlin 12489 Germany

Helmholtz Zentrum Geesthacht Max Planck Strasse 1 Geesthacht 21502 Germany

Industrial Focus Group XUV Optics MESA Institute for Nanotechnology University of Twente Drienerlolaan 5 7522 NB Enschede The Netherlands

Institute of Physics Academy of Sciences of the Czech Republic Na Slovance 2 182 21 Prague 8 Czech Republic

Institute of Physics Polish Academy of Sciences Al Lotników 32 46 PL 02 668 Warsaw Poland

Laser Laboratorium Göttingen eV Hans Adolf Krebs Weg 1 Göttingen 37077 Germany

Physikalisch Technische Bundesanstalt Abbestrasse 2 12 Berlin 10587 Germany

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