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Most cited: 37241545

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Most cited article - PubMed ID 37241545

Modeling of MEMS Transducers with Perforated Moving Electrodes

Micromachines. 2023 Apr 24 ; 14 (5) : . [epub] 20230424

Micromachines (Basel)
ISSN 2072-666X
Source

Article

Editorial for the Special Issue on Micromachined Acoustic Transducers for Audio-Frequency Range

Rufer, Libor
Author Rufer, Libor ORCID Advanced Design & Technology for MEMS, 38140 Rives, France
Shubham, Shubham
Author Shubham, Shubham Syntiant Corporation, Itasca, IL 60143, USA
Wang, Haoran
Author Wang, Haoran ORCID Applied Materials Inc., Santa Clara, CA 95054, USA
Miller, Tom
Author Miller, Tom Knowles, Electronics LLC, Itasca, IL 60143, USA
Honzík, Petr
Author Honzík, Petr Department of Radioelectronics, Faculty of Electrical Engineering, Czech Technical University in Prague, 166 27 Prague, Czech Republic
Ferrari, Vittorio
Author Ferrari, Vittorio ORCID Department of Information Engineering, University of Brescia, 25121 Brescia, Italy

Micromachines. 2025 Jan 08 ; 16 (1) : . [epub] 20250108

Micromachines (Basel)
ISSN 2072-666X
Source

Microelectromechanical systems (MEMS) refer to miniaturized mechanical and electro-mechanical elements that are fabricated through microelectronic processes [...].

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Editorial MeSH

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Modeling of MEMS Transducers with Perforated Moving Electrodes

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