In lens BSE detector with energy filtering
Status PubMed-not-MEDLINE Jazyk angličtina Země Nizozemsko Médium print-electronic
Typ dokumentu časopisecké články, práce podpořená grantem
PubMed
29649705
DOI
10.1016/j.ultramic.2018.03.015
PII: S0304-3991(17)30418-7
Knihovny.cz E-zdroje
- Klíčová slova
- Back scattered electrons, Electron optics, Energy filtering, Scanning electron microscopy,
- Publikační typ
- časopisecké články MeSH
- práce podpořená grantem MeSH
We present a new type of an in-lens detector designed for Thermo Fisher Scientific (FEI) electron microscopes with the Elstar column. A key feature of it is high-pass energy filtering to enable the detection of low-loss backscattered electrons with their energy close to the primary beam energy. We show an application of the detector in imaging of a biological sample where the signal from these electrons leads to a significant improvement in resolution.
Citace poskytuje Crossref.org
In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM
