Ge-Sb-Te thin films were obtained by ns-, ps-, and fs-pulsed laser deposition (PLD) in various experimental conditions. The thickness of the samples was influenced by the Nd-YAG laser wavelength, fluence, target-to-substrate distance, and deposition time. The topography and chemical analysis results showed that the films deposited by ns-PLD revealed droplets on the surface together with a decreased Te concentration and Sb over-stoichiometry. Thin films with improved surface roughness and chemical compositions close to nominal values were deposited by ps- and fs-PLD. The X-ray diffraction and Raman spectroscopy results showed that the samples obtained with ns pulses were partially crystallized while the lower fluences used in ps- and fs-PLD led to amorphous depositions. The optical parameters of the ns-PLD samples were correlated to their structural properties.

Faculty of Chemical Technology University of Pardubice 53210 Pardubice Czech Republic

Faculty of Materials Science and Engineering Gheorghe Asachi Technical University of Iasi 700050 Iasi Romania

Faculty of Physics Al 1 Cuza University of Iasi 700506 Iasi Romania

Integrated Centre for Environmental Science Studies in the North East Development Region CERNESIM Al 1 Cuza University of Iasi 700506 Iasi Romania

National Institute for Lasers Plasma and Radiation Physics RO 077125 Magurele Bucharest Romania

Université de Lille CNRS UMR 8523 PhLAM Physique des Lasers Atomes et Molécules CERLA Centre d'Etudes et de Recherches Lasers et Applications Lille F 59000 France

Université de Rennes 1 CNRS ISCR ⁻UMR 6226 F 35000 Rennes France

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