Micro-Electrical-Mechanical Systems [mikroelektromechanické systémy]
topical
8
- Terms
-
BioMEMS
MEMS
mikroelektrickomechanické systémy
-
BioMEMS
MEMS
Micro-Electro-Mechanical Systems
Persistent link
https://www.medvik.cz/link/D055617
Definition
A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
- DUI
- D055617 MeSH Browser
- CUI
- M0518881
- History note
- 2009
- Public note
- 2009
Allowable subheadings
...
Occurrences in Medvik records
E
Analytical, Diagnostic and Therapeutic Techniques and Equipment
J
Technology, Industry, Agriculture