mikroelektromechanické systémy [Micro-Electrical-Mechanical Systems]
- Termíny
-
BioMEMS
MEMS
mikroelektrickomechanické systémy
-
BioMEMS
MEMS
Micro-Electro-Mechanical Systems
A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
- DUI
- D055617 MeSH Prohlížeč
- CUI
- M0518881
- Historická pozn.
- 2009
- Veřejná pozn.
- 2009
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