The paper is focused on the preparation and surface characterization of gold coatings and nanostructures deposited on glass substrate. Different approaches for the layer preparation were applied. The gold was deposited on the glass with (i) room temperature, (ii) glass heated to 300°C, and (iii) the room temperature-deposited glass which was consequently annealed to 300°C. The sheet resistance and concentration of free carriers were determined by the van der Pauw method. Surface morphology was characterized using an atomic force microscopy. The optical properties of gold nanostructures were measured by UV-vis spectroscopy. The evaporation technique combined with simultaneous heating of the glass leads to change of the sheet resistance, surface roughness, and optical properties of gold nanostructures. The electrically continuous layers are formed for significantly higher thickness (18 nm), if the substrate is heated during evaporation process. The annealing process influences both the structure and optical properties of gold nanostructures. The elevated temperature of glass during evaporation amplifies the peak of plasmon resonance in the structures, the surface morphology being significantly altered.

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