We demonstrate the possibility to examine the free-standing foils of thicknesses in units of nm in the scanning low energy electron microscope, using both reflected and transmitted electrons. Very high contrast has been obtained in dependence on the thickness and structure of the foil. A contribution of secondary electrons to the forward scattered electron signal is discussed and a way of suppressing it is presented. Examples of reflected, total transmitted and dark field transmitted electron signal for two graphene-like samples are shown. Dependence of the transmitted signal on the electron energy is observed.

Institute of Scientific Instruments ASCR v v i Královopolská 147 61264 Brno Czech Republic

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