Tin oxide nanorods (NRs) are vapour synthesised at relatively lower temperatures than previously reported and without the need for substrate pre-treatment, via a vapour-solid mechanism enabled using an aerosol-assisted chemical vapour deposition method. Results demonstrate that the growth of SnO2 NRs is promoted by a compression of the nucleation rate parallel to the substrate and a decrease of the energy barrier for growth perpendicular to the substrate, which are controlled via the deposition conditions. This method provides both single-step formation of the SnO2 NRs and their integration with silicon micromachined platforms, but also allows for in-situ functionalization of the NRs with gold nanoparticles via co-deposition with a gold precursor. The functional properties are demonstrated for gas sensing, with microsensors using functionalised NRs demonstrating enhanced sensing properties towards H2 compared to those based on non-functionalised NRs.

Aix Marseille Université CNRS Université de Toulon IM2NP UMR 7334 Marseille France

Department of Chemistry University College London 20 Gordon Street London WC1H 0AJ UK

Instituto de Microelectrónica de Barcelona Campus UAB Barcelona 08193 Spain

MINOS EMaS Departament d'Enginyeria Electrònica Universitat Rovira i Virgili Paisos Catalans 26 Tarragona 43007 Spain

SIX Research Centre Brno University of Technology Technická 10 Brno CZ 61600 Czech Republic

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Influence of Mg Doping Levels on the Sensing Properties of SnO2 Films

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods