Whilst columnar zinc oxide (ZnO) structures in the form of rods or wires have been synthesized previously by different liquid- or vapor-phase routes, their high cost production and/or incompatibility with microfabrication technologies, due to the use of pre-deposited catalyst-seeds and/or high processing temperatures exceeding 900 °C, represent a drawback for a widespread use of these methods. Here, however, we report the synthesis of ZnO rods via a non-catalyzed vapor-solid mechanism enabled by using an aerosol-assisted chemical vapor deposition (CVD) method at 400 °C with zinc chloride (ZnCl2) as the precursor and ethanol as the carrier solvent. This method provides both single-step formation of ZnO rods and the possibility of their direct integration with various substrate types, including silicon, silicon-based micromachined platforms, quartz, or high heat resistant polymers. This potentially facilitates the use of this method at a large-scale, due to its compatibility with state-of-the-art microfabrication processes for device manufacture. This report also describes the properties of these structures (e.g., morphology, crystalline phase, optical band gap, chemical composition, electrical resistance) and validates its gas sensing functionality towards carbon monoxide.

Institute of Physical Engineering and Central European Institute of Technology Brno University of Technology

Institute of Physics of Material Academy of Science of Czech Republic

Instituto de Microelectrónica de Barcelona

Instituto de Microelectrónica de Barcelona ; SIX Research Centre Brno University of Technology;

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Kozuka Y, Tsukazaki A, Kawasaki M. Challenges and opportunities of ZnO-related single crystalline heterostructures. Appl Phys Rev. 2014;1(1):011303.

Wang ZL. Splendid One-Dimensional Nanostructures of Zinc Oxide: A New Nanomaterial Family for Nanotechnology. ACS Nano. 2008;2(10):1987–1992. PubMed

Pal J, Pal T. Faceted metal and metal oxide nanoparticles: design, fabrication and catalysis. Nanoscale. 2015;7(34):14159–14190. PubMed

Sun Y, et al. The Applications of Morphology Controlled ZnO in Catalysis. Catalysts. 2016;6(12):188.

Vallejos S, Umek P, Blackman C. AACVD Control parameters for selective deposition of tungsten oxide nanostrucutres. J Nanosci Nanotechnol. 2011;11:8214–8220. PubMed

Vallejos S, et al. Aerosol assisted chemical vapour deposition of gas sensitive SnO2and Au-functionalised SnO2nanorods via a non-catalysed vapour solid (VS) mechanism. Sci Rep. 2016;6:28464. PubMed PMC

Hou X, Choy KL. Processing and Applications of Aerosol-Assisted Chemical Vapor Deposition. Chem Vap Deposition. 2006;12(10):583–596.

Ling M, Blackman C. Growth mechanism of planar or nanorod structured tungsten oxide thin films deposited via aerosol assisted chemical vapour deposition (AACVD) Phys Status Solidi C. 2015;12(7):869–877.

Vallejos S, et al. ZnO Rods with Exposed {100} Facets Grown via a Self-Catalyzed Vapor-Solid Mechanism and Their Photocatalytic and Gas Sensing Properties. ACS Appl Mater Inter. 2016;8(48):33335–33342. PubMed

Srikant V, Clarke DR. On the optical band gap of zinc oxide. J Appl Phys. 1998;83(10):5447–5451.

Gogurla N, Sinha AK, Santra S, Manna S, Ray SK. Multifunctional Au-ZnO Plasmonic Nanostructures for Enhanced UV Photodetector and Room Temperature NO Sensing Devices. Sci Rep. 2014;4:6481–6489. PubMed PMC

Sutka A, et al. A straightforward and "green" solvothermal synthesis of Al doped zinc oxide plasmonic nanocrystals and piezoresistive elastomer nanocomposite. RSC Advances. 2015;5(78):63846–63852.

Vallejos S, et al. Chemoresistive micromachined gas sensors based on functionalized metal oxide nanowires: Performance and reliability. Sens Actuator B. 2016;235:525–534.

Bhachu DS, Sankar G, Parkin IP. Aerosol Assisted Chemical Vapor Deposition of Transparent Conductive Zinc Oxide Films. Chem Mater. 2012;24(24):4704–4710.

Chen S, Wilson RM, Binions R. Synthesis of highly surface-textured ZnO thin films by aerosol assisted chemical vapour deposition. J Mater Chem. A. 2015;3(11):5794–5797.

Murillo G, Rodríguez-Ruiz I, Esteve J. Selective Area Growth of High-Quality ZnO Nanosheets Assisted by Patternable AlN Seed Layer for Wafer-Level Integration. Cryst Growth Des. 2016;16(9):5059–5066.

Sosnowchik BD, Lin L, Englander O. Localized heating induced chemical vapor deposition for one-dimensional nanostructure synthesis. J Appl Phys. 2010;107(5)

Annanouch FE, et al. Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays. Sens Actuators, B. 2015;216:374–383.

ZnO Structures with Surface Nanoscale Interfaces Formed by Au, Fe2O3, or Cu2O Modifier Nanoparticles: Characterization and Gas Sensing Properties

Cerium Oxide-Tungsten Oxide Core-Shell Nanowire-Based Microsensors Sensitive to Acetone