Confocal micro-beam X-ray fluorescence analysis (confocal micro-XRF) is a non-destructive analytical tool for investigation of sample composition that enables acquiring three-dimensionally resolved information. This work describes a calibration procedure of a laboratory confocal micro-XRF setup, which leads to determination of its characteristic parameters. The calibration is performed using a tabletop confocal micro-XRF spectrometer designed recently at the Czech Technical University in Prague. The calibration procedure performed within this work comprises the essential steps of the setup characterization: excitation spectrum calculation, experimental determination of energy-dependent confocal volume size and integral sensitivity and calculation of the spectrometer sensitivity function. The results of the setup calibration will be used for development of a procedure enabling quantitative evaluation of the measured depth profiles.

Czech Technical University Prague Faculty of Nuclear Sciences and Physical Engineering Břehová 7 115 19 Prague Czech Republic

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X-ray Fluorescence Analysis of Pigments in Gothic Frescoes, Coats of Arms, and Polychromy on Sculptures on the Triforium in St. Vitus Cathedral on the Territory of the Czech Kingdom in the 14th Century