Black aluminium thin films were prepared by direct current (DC) pulsed magnetron sputtering. The N2 concentration in the Ar-N2 mixture that was used as the deposition atmosphere was varied from 0 to 10%, and its impact on the film growth and optical properties was studied. A strong change in the film growth process was observed as a function of the N2 concentration. At a specific N2 concentration of ∼6%, the Al film growth process favoured the formation of a moth-eye-like antireflective surface. This surface morphology, which was similar to the structure of a cauliflower, is known to trap incident light, resulting in films with a very low reflectivity. A diffuse reflectivity lower than 4% was reached in the ultraviolet-visible-near infrared (UV-VIS-NIR) spectral range that corresponds to a value observed for an ultrahigh absorber. We found that for the preparation of black aluminium, the nitrogen content plays an important role in film formation and the resulting film morphology.

Department of Physics and Measurements University of Chemistry and Technology Prague Technicka 5 16628 Praha 6 Czech Republic

Faculty of Mathematics and Physics Charles University Ke Karlovu 3 12116 Praha 2 Czech Republic

Faculty of Science Charles University Hlavova 2030 8 12843 Praha 2 Czech Republic

Institute of Physics of the Czech Academy of Sciences Na Slovance 1999 2 182 21 Prague Czech Republic

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Zaeschmar G. Nedoluha A. J. Opt. Soc. Am. 1972;62:348. doi: 10.1364/JOSA.62.000348. DOI

Pfund A. H. Rev. Sci. Instrum. 1930;1:397–399. doi: 10.1063/1.1748708. DOI

Lysenko V. S. Malnev A. F. Zh. Prikl. Spektrosk. 1969;10:838.

Strimer P. Gerbaux X. Hadni A. Souel T. Infrared Phys. 1981;21:37–39. doi: 10.1016/0020-0891(81)90007-5. DOI

Wang C. M. Chen Y. C. Lee M. S. Chen K. J. Jpn. J. Appl. Phys., Part 1. 2000;39:551–554. doi: 10.1143/JJAP.39.551. DOI

Christiansen A. B. Caringal G. P. Clausen J. S. Grajower M. Taha H. Levy U. Mortensen N. A. Kristensen A. Sci. Rep. 2015;5:10563. doi: 10.1038/srep10563. PubMed DOI PMC

Gu S. Lu Y. Ding Y. Li L. Song H. Wang J. Wu Q. Biosens. Bioelectron. 2014;55:106–112. doi: 10.1016/j.bios.2013.12.002. PubMed DOI

Mills A. Platinum Met. Rev. 2007;51:52. doi: 10.1595/147106707X176210. DOI

Zhang X. Y. Shan F. Zhou H. L. Su D. Xue X. M. Wu J. Y. Chen Y. Z. Zhao N. Zhang T. J. Mater. Chem. C. 2018;6:989–999. doi: 10.1039/C7TC04486K. DOI

Huang ​H. Yang L. M. Liu J. Proc. SPIE. 2013;8876:88760M. doi: 10.1117/12.2026244. DOI

Vorobyev A. Y. Guo C. L. Adv. Mech. Eng. 2010;2:452749. doi: 10.1155/2010/452749. DOI

Fernandez R. E. Koklu A. Mansoorifar A. Beskok A. Biomicrofluidics. 2016;10:033101. doi: 10.1063/1.4946015. PubMed DOI PMC

More-Chevalier J. Yudin P. V. Cibert C. Bednyakov P. Fitl P. Valenta J. Novotný M. Savinov M. Poupon M. Zikmund T. Poullain G. Lančok J. J. Appl. Phys. 2019;126:214501. doi: 10.1063/1.5130538. DOI

Anderson R. E. Crawford J. R. Appl. Opt. 1981;20:2041–2042. doi: 10.1364/AO.20.002041. PubMed DOI

O'Neill P. Ignatiev A. Doland C. Sol. Energy. 1978;21:465–468. doi: 10.1016/0038-092X(78)90069-5. DOI

Palatnik L. S. Kovaleva O. I. Tartakovskaya I. K. Derevyanchenko A. S. J. Appl. Spectrosc. 1977;27:1524–1526. doi: 10.1007/BF00605537. DOI

Betts D. B. Clarke F. J. J. Cox L. J. Larkin J. A. J. Phys. E: Sci. Instrum. 1985;18:689–696. doi: 10.1088/0022-3735/18/8/010. DOI

Hu X. F. Qin S. Y. Tian J. F. Hu M. F. Sol. Energy Mater. 1988;17:207–215. doi: 10.1016/0165-1633(88)90027-5. DOI

Milligan W. O. Focke A. B. J. Phys. Chem. 1941;45:107–111. doi: 10.1021/j150406a009. DOI

Novotny ​M. Bulir J. Lancok J. Pokorny P. Czech Rep. 2017:307110.

Vitrey A. Alvarez R. Palmero A. Gonzalez M. U. Garcia-Martin J. M. Beilstein J. Nanotechnol. 2017;8:434–439. doi: 10.3762/bjnano.8.46. PubMed DOI PMC

Alvarez R. García-Martín J. M. Macías-Montero M. Gonzalez-Garcia L. González J. C. Rico V. Perlich J. Cotrino J. González-Elipe A. R. Palmero A. Nanotechnology. 2013;24:045604. doi: 10.1088/0957-4484/24/4/045604. PubMed DOI

Toor F. Miller J. B. Davidson L. M. Duan W. Jura M. P. Yim J. Forziati J. Black M. R. Nanoscale. 2016;8:15448–15466. doi: 10.1039/C6NR04506E. PubMed DOI

Zheng B. X. Wang W. J. Jiang G. D. Mei X. S. Appl. Phys. B: Lasers Opt. 2016;122:180. doi: 10.1007/s00340-016-6449-1. DOI

Wobbeking K. Li M. J. Hubner E. G. Schade W. RSC Adv. 2019;9:37598–37607. doi: 10.1039/C9RA05918K. PubMed DOI PMC

Rehrig D. L. Plating. 1974;61:43.

Novotny M. Fitl P. Sytchkova A. K. Bulir J. Lancok J. Pokorny P. Najdek D. Bocan J. Cent. Eur. J. Phys. 2009;7:327–331.

Georges C. Sanchez H. Semmar N. Boulmer-Leborgne C. Perrin C. Simon D. Appl. Surf. Sci. 2002;186:117–123. doi: 10.1016/S0169-4332(01)00605-5. DOI

Pokorný P. Musil J. Fitl P. Novotný M. Lančok J. Bulíř J. Plasma Processes Polym. 2015;12:416–421. doi: 10.1002/ppap.201400172. DOI

Rietveld H. M. Acta Crystallogr. 1967;22:151–152. doi: 10.1107/S0365110X67000234. DOI

Hill R. J. Howard C. J. J. Appl. Crystallogr. 1987;20:467–474. doi: 10.1107/S0021889887086199. DOI

Miller P. H. DuMond J. W. M. Phys. Rev. 1940;57:198–206. doi: 10.1103/PhysRev.57.198. DOI

Zhou Y. M. Xie Z. Xiao H. N. Hu P. F. He J. J. Vac. Sci. Technol. 2009;27:109–113. doi: 10.1116/1.3046143. DOI

Singh C. K. Ilango S. Polaki S. R. Dash S. Tyagi A. K. Mater. Res. Express. 2014;1:036401. doi: 10.1088/2053-1591/1/3/036401. DOI

Zhou Y. M. Xie Z. Xiao H. N. Hu P. F. He J. Vacuum. 2008;83:286–291. doi: 10.1016/j.vacuum.2008.07.002. DOI

Yu H. Z. Thompson C. V. J. Vac. Sci. Technol., A. 2015;33:021504. doi: 10.1116/1.4902957. DOI

Cougnon F. G. Dulmaa A. Dedoncker R. Galbadrakh R. Depla D. Appl. Phys. Lett. 2018;112:221903. doi: 10.1063/1.5021528. DOI

Petrov I. Barna P. B. Hultman L. Greene J. E. J. Vac. Sci. Technol. 2003;21:S117–S128. doi: 10.1116/1.1601610. DOI

Piao H. McIntyre N. S. Surf. Interface Anal. 2002;33:591–594. doi: 10.1002/sia.1425. DOI

Dean J. A. and Lange N. A., Lange's Handbook of Chemistry, McGraw-Hill, 1999

Ehrenreich H. Philipp H. R. Segall B. Phys. Rev. 1963;132:1918–1928. doi: 10.1103/PhysRev.132.1918. DOI

Diest K. Liberman V. Lennon D. M. Welander P. B. Rothschild M. Opt. Express. 2013;21:28638–28650. doi: 10.1364/OE.21.028638. PubMed DOI

Novotny M. Bulir J. Lancok J. Pokorny P. Bodnar M. J. Nanophotonics. 2011;5:051503. doi: 10.1117/1.3543816. DOI

Kotsedi L. Mthunzi P. Nuru Z. Y. Eaton S. M. Sechoghela P. Mongwaketsi N. Ramponi R. Maaza M. Appl. Surf. Sci. 2015;353:1334–1341. doi: 10.1016/j.apsusc.2015.08.047. DOI

Vorobyev A. Y. Guo C. J. Appl. Phys. 2008;104:053516. doi: 10.1063/1.2975989. DOI

Wilson S. J. Hutley M. C. Opt. Acta. 1982;29:993–1009. doi: 10.1080/713820946. DOI

Thompson C. V. Annu. Rev. Mater. Sci. 2000;30:159–190. doi: 10.1146/annurev.matsci.30.1.159. DOI

Grovenor C. R. M. Hentzell H. T. G. Smith D. A. Acta Metall. Mater. 1984;32:773–781. doi: 10.1016/0001-6160(84)90150-0. DOI

Novotny M. Bulir J. Pokorny P. Bocan J. Fitl P. Lancok J. Musil J. J. Optoelectron. Adv. Mater. 2010;12:697–700.

Pokorny P. Bulir J. Lancok J. Musil J. Novotny M. Plasma Processes Polym. 2010;7:910–914. doi: 10.1002/ppap.201000064. DOI

Moelans N. Blanpain B. Wollants P. Acta Mater. 2007;55:2173–2182. doi: 10.1016/j.actamat.2006.11.018. DOI

Melikhova O. Cizek J. Hruska P. Liedke M. O. Butterling M. Wagner A. Novotny M. More-Chevalier J. Acta Phys. Pol., B. 2020;51:383–387.

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