Single-pixel imaging, originally developed in light optics, facilitates fast three-dimensional sample reconstruction as well as probing with light wavelengths undetectable by conventional multi-pixel detectors. However, the spatial resolution of optics-based single-pixel microscopy is limited by diffraction to hundreds of nanometers. Here, we propose an implementation of single-pixel imaging relying on attainable modifications of currently available ultrafast electron microscopes in which optically modulated electrons are used instead of photons to achieve subnanometer spatially and temporally resolved single-pixel imaging. We simulate electron beam profiles generated by interaction with the optical field produced by an externally programmable spatial light modulator and demonstrate the feasibility of the method by showing that the sample image and its temporal evolution can be reconstructed using realistic imperfect illumination patterns. Electron single-pixel imaging holds strong potential for application in low-dose probing of beam-sensitive biological and molecular samples, including rapid screening during in situ experiments.

Central European Institute of Technology Brno University of Technology 612 00 Brno Czech Republic

Centro S3 Istituto di Nanoscienze CNR 41125 Modena Italy

ICFO Institut de Ciencies Fotoniques The Barcelona Institute of Science and Technology Castelldefels Barcelona 08860 Spain

ICREA Institució Catalana de Recerca i Estudis Avançats Passeig Lluís Companys 23 08010 Barcelona Spain

Laboratory of Ultrafast Microscopy for Nanoscale Dynamics Department of Materials Science University of Milano Bicocca Via Cozzi 55 20121 Milano Italy

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