Nanocantilevers have become key components of nanomechanical sensors that exploit changes in their resonant frequencies or static deflection in response to the environment. It is necessary that they can operate at a given, but adjustable, resonant frequency and/or static deflection ranges. Here we propose a new class of nanocantilevers with a significantly tunable spectrum of the resonant frequencies and changeable static deflection utilizing the unique properties of a phase-transforming NiTi film sputtered on the usual nanotechnology cantilever materials. The reversible frequency tuning and the adjustable static deflection are obtained by intentionally changing the Young's modulus and the interlayer stress of the NiTi film during its phase transformation, while the usual cantilever elastic materials guarantee a high frequency actuation (up to tens of MHz). By incorporating the NiTi phase transformation characteristic into the classical continuum mechanics theory we present theoretical models that account for the nanocantilever frequency shift and variation in static deflection caused by a phase transformation of NiTi film. Due to the practical importance in nanomechanical sensors, we carry out a complete theoretical analysis and evaluate the impact of NiTi film on the cantilever Young's modulus, static deflection, and the resonant frequencies. Moreover, the importance of proposed NiTi nanocantilever is illustrated on the nanomechanical based mass sensors. Our findings will be of value in the development of advanced nanotechnology sensors with intentionally-changeable physical and mechanical properties.

Institute of Physics Czech Academy of Sciences 18221 Prague Czech Republic

School of Sciences Harbin Institute of Technology Shenzhen Graduate School Shenzhen 551800 Guangdong China

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