TiO2 nanotube layers (TNTs) decorated with Al2O3/MoS2/Al2O3 are investigated as a negative electrode for 3D Li-ion microbatteries. Homogenous nanosheets decoration of MoS2, sandwiched between Al2O3 coatings within self-supporting TNTs was carried out using atomic layer deposition (ALD) process. The structure, morphology, and electrochemical performance of the Al2O3/MoS2/Al2O3-decorated TNTs were studied using scanning transmission electron microscopy, energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, and chronopotentiometry. Al2O3/MoS2/Al2O3-decorated TNTs deliver an areal capacity almost three times higher than that obtained for MoS2-decorated TNTs and as-prepared TNTs after 100 cycles at 1C. Moreover, stable and high discharge capacity (414 µAh cm-2) has been obtained after 200 cycles even at very fast kinetics (3C).

Al Farabi Kazakh National University Center of Physical Chemical Methods of Research and Analysis 96A Tole bi str 050012 Almaty Kazakhstan

Center of Materials and Nanotechnologies Faculty of Chemical Technology University of Pardubice Nam Cs Legii 565 53002 Pardubice Czech Republic

Central European Institute of Technology Brno University of Technology Purkyňova 123 612 00 Brno Czech Republic

Mines Saint Etienne Center of Microelectronics in Provence Flexible Electronics Department 13541 Gardanne France

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