The main aim of this study was to describe the treatment of carbon sheet with a high-energy excimer laser. The excimer modification changed the surface chemistry and morphology of carbon. The appearance of specific carbon forms and modifications have been detected due to exposure to laser beam fluencies up to 8 J cm-2. High fluence optics was used for dramatic changes in the carbon layer with the possibility of Q-carbon formation; a specific amorphous carbon phase was detected with Raman spectroscopy. The changes in morphology were determined with atomic force microscopy and confirmed with scanning electron microscopy, where the partial formation of the Q-carbon phase was detected. Energy dispersive spectroscopy (EDS) was applied for a detailed study of surface chemistry. The particular shift of functional groups induced on laser-treated areas was determined by X-ray photoelectron spectroscopy. For the first time, high-dose laser exposure successfully induced a specific amorphous carbon phase.

Central Laboratories University of Chemistry and Technology 166 28 Prague Czech Republic

Department of Power Engineering University of Chemistry and Technology 166 28 Prague Czech Republic

Department of Solid State Engineering University of Chemistry and Technology 166 28 Prague Czech Republic

Faculty of Science J E Purkyně University in Ústí nad Labem 400 96 Ústí nad Labem Czech Republic

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High-Energy Excimer Annealing of Nanodiamond Layers