Autonomous micro/nanorobots capable of performing programmed missions are at the forefront of next-generation micromachinery. These small robotic systems are predominantly constructed using functional components sourced from micro- and nanoscale materials; therefore, combining them with various advanced materials represents a pivotal direction toward achieving a higher level of intelligence and multifunctionality. This review provides a comprehensive overview of advanced materials for innovative micro/nanorobotics, focusing on the five families of materials that have witnessed the most rapid advancements over the last decade: two-dimensional materials, metal-organic frameworks, semiconductors, polymers, and biological cells. Their unique physicochemical, mechanical, optical, and biological properties have been integrated into micro/nanorobots to achieve greater maneuverability, programmability, intelligence, and multifunctionality in collective behaviors. The design and fabrication methods for hybrid robotic systems are discussed based on the material categories. In addition, their promising potential for powering motion and/or (multi-)functionality is described and the fundamental principles underlying them are explained. Finally, their extensive use in a variety of applications, including environmental remediation, (bio)sensing, therapeutics, etc., and remaining challenges and perspectives for future research are discussed.

Advanced Nanorobots and Multiscale Robotics Laboratory Faculty of Electrical Engineering and Computer Science VSB Technical University of Ostrava 17 listopadu 2172 15 Ostrava 70800 Czech Republic

Chair of Micro and Nano Biosystems Center for Molecular Bioengineering Dresden University of Technology 01062 Dresden Germany

CIC nanoGUNE BRTA Tolosa Hiribidea 76 San Sebastián 20018 Spain

Department of Chemical and Biomolecular Engineering Yonsei University 50 Yonsei ro Seodaemun gu Seoul 03722 Republic of Korea

Department of Medical Research China Medical University Hospital China Medical University No 91 Hsueh Shih Road Taichung Taiwan

Future Energy and Innovation Laboratory Central European Institute of Technology Brno University of Technology Purkyňova 123 Brno 61200 Czech Republic

IKERBASQUE Basque Foundation for Science Plaza Euskadi 5 Bilbao 48009 Spain

Micro and NanoBiomedical Engineering Group 01069 Dresden Germany

Multi Scale Robotics Lab Institute of Robotics and Intelligent Systems ETH Zürich Tannenstrasse 3 CH 8092 Zürich Switzerland

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