This study investigates supersonic flow within a nozzle under low-pressure conditions at the continuum mechanics boundary. This phenomenon is commonly encountered in applications such as the differentially pumped chamber of an Environmental Scanning Electron Microscope (ESEM), which employs an aperture to separate two regions with a great pressure gradient. The nozzle geometry and flow control in this region can significantly influence the scattering and loss of the primary electron beam traversing the differentially pumped chamber and aperture. To this end, an experimental chamber was designed to explore aspects of this low-pressure regime, characterized by a varying ratio of inertial to viscous forces. The initial experimental results obtained using pressure sensors from the fabricated experimental chamber were utilized to refine the Ansys Fluent simulation setup, and in this combined approach, initial analyses of supersonic flow and shock waves in low-pressure environments were conducted. The refined Ansys Fluent system demonstrated a very good correspondence with the experimental findings. Subsequently, an analysis of the influence of surface roughness on the resulting flow behavior in low-pressure conditions was performed on this refined model using the refined CFD model. Based on the obtained results, a comparison of the influence of nozzle roughness on the resulting electron beam scattering was conducted for selected low-pressure variants relevant to the operational conditions of the Environmental Scanning Electron Microscope (ESEM). The influence of roughness at elevated working pressures within the ESEM operating regime on reduced electron beam scattering has been demonstrated. At lower pressure values within the ESEM operating regime, this influence is significantly diminished.

• Klíčová slova
• Ansys Fluent, CFD, ESEM, aperture, differentially pumped chamber, low pressure, nozzle, roughness, shock wave,
• Publikační typ
• časopisecké články MeSH

The paper presents a methodology that combines experimental measurements and mathematical-physics analyses to investigate the flow behavior in a nozzle-equipped aperture associated with the solution of its impact on electron beam dispersion in an environmental scanning electron microscope (ESEM). The shape of the nozzle significantly influences the character of the supersonic flow beyond the aperture, especially the shape and type of shock waves, which are highly dense compared to the surrounding gas. These significantly affect the electron scattering, which influences the resulting image. This paper analyzes the effect of aperture and nozzle shaping under specific low-pressure conditions and its impact on the electron dispersion of the primary electron beam.

• Klíčová slova
• Ansys Fluent, CFD, ESEM, critical flow, electron dispersion, nozzle, shock wave,
• Publikační typ
• časopisecké články MeSH

A combination of experimental measurement preparations using pressure and temperature sensors in conjunction with the theory of one-dimensional isentropic flow and mathematical physics analyses is presented as a tool for analysis in this paper. Furthermore, the subsequent development of a nozzle for use in environmental electron microscopy between the specimen chamber and the differentially pumped chamber is described. Based on experimental measurements, an analysis of the impact of the nozzle shaping located behind the aperture on the character of the supersonic flow and the resulting dispersion of the electron beam passing through the differential pumped chamber is carried out on the determined pressure ratio using a combination of theory and mathematical physics analyses. The results show that nozzle shapes causing under-expanded gas outflow from the aperture to the nozzle have a worse impact on the dispersion of the primary electron beam. This is due to the flow velocity control. The controlled reduction in the static pressure curve on the primary electron beam path thus causes a significantly higher course of electron dispersion values than variants with shapes causing over-expanded gas outflow.

• Klíčová slova
• Ansys Fluent, CFD, ESEM, critical flow, nozzle, numerical simulation,
• Publikační typ
• časopisecké články MeSH