Quantitative-phase-contrast imaging of a two-level surface described as a 2D linear filtering process
Language English Country United States Media print
Document type Journal Article, Research Support, Non-U.S. Gov't
PubMed
20940953
DOI
10.1364/oe.18.020585
PII: 205693
Knihovny.cz E-resources
- MeSH
- Equipment Design MeSH
- Fourier Analysis MeSH
- Holography methods MeSH
- Interferometry methods MeSH
- Silicon chemistry MeSH
- Crystallization MeSH
- Microscopy, Atomic Force methods MeSH
- Microscopy, Electron, Scanning methods MeSH
- Microscopy, Phase-Contrast methods MeSH
- Image Processing, Computer-Assisted MeSH
- Surface Properties MeSH
- Models, Statistical MeSH
- Light MeSH
- Imaging, Three-Dimensional methods MeSH
- Publication type
- Journal Article MeSH
- Research Support, Non-U.S. Gov't MeSH
- Names of Substances
- Silicon MeSH
The paper deals with quantitative phase imaging of two-height-level surface reliefs. The imaging is considered to be a linear system and, consequently, the Fourier transform of the image is the product of the Fourier transform of a 2D function characterizing the surface and a specific 2D coherent transfer function. The Fourier transform of functions specifying periodic surface reliefs is factorized into two functions similar to lattice and structure amplitudes in crystal structure analysis. The approach to the imaging process described in the paper enables us to examine the dependence of the phase image on the surface geometry. Theoretical results are verified experimentally by means of a digital holographic microscope.
References provided by Crossref.org
Automated alignment method for coherence-controlled holographic microscope
