In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate/Au/photoresist. The ellipsometric characterization of the structure layers, the simulated reflectance spectra, and optical field distributions under GMR conditions showed that multiple waveguide modes can be excited in the PWS. These modes can be used for refractive index sensing, and the theoretical analysis of the designed PWS showed a sensitivity to the refractive index up to 6600 nm per refractive index unit (RIU) and a figure of merit (FOM) up to 224 RIU-1. In response to these promising theoretical results, the PWS was used to measure the relative humidity (RH) of moist air with a sensitivity up to 0.141 nm/%RH and a FOM reaching 3.7 × 10-3%RH-1. The results demonstrate that this highly-sensitive and hysteresis-free sensor based on GMR has the potential to be used in a wide range of applications.

Department of Physics Faculty of Electrical Engineering and Information Technology University of Zilina Univerzitna 1 01026 Zilina Slovakia

Department of Physics Technical University Ostrava 17 listopadu 2172 15 708 00 Ostrava Poruba Czech Republic

Zobrazit více v PubMed

Chen L. Optical Devices Based on Symmetrical Metal Cladding Waveguides. In: Xi P., editor. Optical Devices in Communication and Computation. In Tech; Rijeka, Croatia: 2012. pp. 127–152.

Lan G., Zhang S., Zhang H., Zhu Y., Qing L., Li D., Nong J., Wang W., Chen L., Wei W. High-performance refractive index sensor based on guided-mode resonance in all-dielectric nano-slit array. Phys. Lett. A. 2019;383:1478–1482. doi: 10.1016/j.physleta.2019.01.057. DOI

Zhou Y., Wang B., Guo Z., Wu X. Guided Mode Resonance Sensors with Optimized Figure of Merit. Nanomaterials. 2019;9:837. doi: 10.3390/nano9060837. PubMed DOI PMC

Magnusson R., Wang S.S. New principle for optical filters. Appl. Phys. Lett. 1992;61:1022. doi: 10.1063/1.107703. DOI

Sakat E., Vincent G., Ghenuche P., Bardou N., Dupuis C., Collin S., Pardo F., Haïdar R., Pelouard J.-L. Free-standing guided-mode resonance band-pass filters: From 1D to 2D structures. Opt. Express. 2012;20:13082–13090. doi: 10.1364/OE.20.013082. PubMed DOI

Zheng G., Zou X., Xu L., Wang J. Single layer narrow bandwidth angle-insensitive guided-mode resonance badstop filters. Optik. 2017;130:19–23. doi: 10.1016/j.ijleo.2016.11.043. DOI

Katchalski T., Levy-Yurista G., Friesem A.A., Martin G., Hierle R., Zyss J. Ligh modulation with electro-optic polymer-based resonant grating waveguide structures. Opt. Express. 2015;13:4645–4650. doi: 10.1364/OPEX.13.004645. PubMed DOI

Forouzmand A., Mosallaei H. Electro-optical Amplitude and Phase Modulators Based on Tunable Guided-Mode Resonance Effect. ACS Photonics. 2019;11:2860–2869. doi: 10.1021/acsphotonics.9b00950. DOI

Li G., Yang J., Zhang Z., Wen K., Tao Y., Han Y., Zhang Z. Double Spectral Electromagnetically Induced Transparency Based on Double-Bar Dielectric Grating and Its Sensor Application. Appl. Sci. 2020;10:3033. doi: 10.3390/app10093033. DOI

Wei X., Weiss S.M. Guided mode biosensor based on grating coupled porous silicon waveguide. Opt. Express. 2011;19:11330–11339. doi: 10.1364/OE.19.011330. PubMed DOI

Lin Y.-C., Hsieh W.-H., Chau L.-K., Chang G.-E. Intensity-detection-based guided-mode-resonance optofluidic biosensing system for rapid, low-cost, label-free detection. Sens. Actuators B Chem. 2017;250:659–666. doi: 10.1016/j.snb.2017.04.187. DOI

Sahoo P.K., Sarkar S., Joseph J. High sensitivity guided-mode-resonance optical sensor employing phase detection. Sci. Rep. 2017;7:7607. doi: 10.1038/s41598-017-07843-z. PubMed DOI PMC

Wang X., Wu X., Chen Y., Bai X., Pang Z., Yang H., Qi Y., Wen X. Investigation of wide-range refractive index sensor based on asymmetric metal-cladding dielectric waveguide structure. AIP Adv. 2018;8:105029. doi: 10.1063/1.5043469. PubMed DOI PMC

Triggs G.J., Wang Y., Peardon C.P., Fischer M., Evans G.J.O., Krauss T.F. Chirped guided-mode resonance biosensors. Optica. 2017;4:229–234. doi: 10.1364/OPTICA.4.000229. PubMed DOI PMC

Shin J.H., Ok G. Terahertz Guided Mode Resonance Sensing Platform Based on Freestanding Dielectric Materials: High Q-Factor and Tunable Spectrum. Appl. Sci. 2020;10:1013. doi: 10.3390/app10031013. DOI

Taya S., Elwasife K. Guided modes in a metal-clad waveguide comprising a left-handed material as a guiding layer. IJRRAS. 2012;13:294–305.

Nesterenko D.V., Hayashi S., Sekkat Z. Extremely narrow resonances, giant sensitivity and field enhancement in low-loss waveguide sensors. J. Opt. 2016;18:065004. doi: 10.1088/2040-8978/18/6/065004. DOI

Anous N., Ramadan T., Abdallah M., Qaraqe K., Khalil D. Planar broad-band and wide-range hybrid plasmonic IMI filters with induced transmission for visible light applications. Appl. Opt. 2017;56:8751–8758. doi: 10.1364/AO.56.008751. PubMed DOI

Zhou H., Sang Q., Wang X., Chen X. Symmetrical Metal Cladding Waveguide for Absorption Sensing and its Sensitivity Analysis. IEEE Photon. J. 2017;9:6800509. doi: 10.1109/JPHOT.2016.2640660. DOI

Wang X., Wu X., Zhu J., Pang Z., Yang H., Qi Y. Theoretical Investigation of a Highly Sensitive Refractive-Index Sensor Based on TM0 Waveguide Mode Resonance Excited in an Asymmetric Metal-Cladding Dielectric Waveguide Structure. Sensors. 2019;19:1187. doi: 10.3390/s19051187. PubMed DOI PMC

Yang L., Wang J., Yang L., Hu Z.-D., Wu X., Zheng G. Characteristics of multiple Fano resonances in waveguide-coupled surface plasmon resonance sensors based on waveguide theory. Sci. Rep. 2018;8:2560. doi: 10.1038/s41598-018-20952-7. PubMed DOI PMC

Yeh P. Optical Waves in Layered Media. John Wiley and Sons; Somerset, NJ, USA: 2005.

Nabok A., Tsargorodskaya A. The method of total internal reflection ellipsometry for thin film characterization and sensing. Thin Solid Films. 2008;516:8993–9001. doi: 10.1016/j.tsf.2007.11.077. DOI

Azzam R.M.A., Bashara N.M. Ellipsometry and Polarized Light. North Holland Publishing Co.; Amsterdam, The Netherland: 1992. pp. 332–358.

Chlebus R., Chylek J., Ciprian D., Hlubina P. Surface plasmon resonance based measurement of the dielectric function of a thin metal film. Sensors. 2018;18:3693. doi: 10.3390/s18113693. PubMed DOI PMC

Gryga M., Ciprian D., Hlubina P. Bloch surface wave resonance based sensors as an alternative to surface plasmon resonance sensors. Sensors. 2020;20:5119. doi: 10.3390/s20185119. PubMed DOI PMC

Mehrabani S., Kwong P., Gupta M., Arman A. Hybrid microcavity humidity sensor. Appl. Phys. Lett. 2013;102:241101. doi: 10.1063/1.4811265. DOI

Lee K.J., Wawro D., Priambodo P.S., Magnusson R. Agarose-Gel Based Guided-Mode Resonance Humidity Sensor. IEEE Sens. J. 2007;7:409–414. doi: 10.1109/JSEN.2006.890129. DOI

Peng J., Wang W., Qu Y., Sun T., Lv D., Dai J., Yang M. Thin films based one-dimensional photonic crystal for humidity detection. Sens. Actuators A Phys. 2017;263:209–215. doi: 10.1016/j.sna.2017.06.011. DOI

Fuentes O., Corres J.M., Matias I.R., Villar I. Generation of Lossy Mode Resonances in Planar Waveguides Toward Development of Humidity Sensors. J. Lightwave Technol. 2019;37:2300–2306. doi: 10.1109/JLT.2019.2902045. DOI

Bohorquez D.L., Del Villar I., Corres J.M., Matias I.R. Generation of lossy mode resonances in a broadband range with multilayer coated coverslips optimized for humidity sensing. Sens. Actuators B Chem. 2020;325:128795. doi: 10.1016/j.snb.2020.128795. DOI

Kolpakov S.A., Gordon N.T., Mou C., Zhou K. Toward a new generation of photonic humidity sensors. Sensors. 2014;14:3986–4013. doi: 10.3390/s140303986. PubMed DOI PMC

Ascorbe J., Corres J.M., Arregu F.J., Matias I.R. Recent developments in fiber optics humidity sensors. Sensors. 2017;17:893. doi: 10.3390/s17040893. PubMed DOI PMC

Highly Sensitive Plasmonic Structures Utilizing a Silicon Dioxide Overlayer

Efficient Optical Sensing Based on Phase Shift of Waves Supported by a One-Dimensional Photonic Crystal