The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i.e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 µm) and middle infrared (6.3 and 7.7 µm), band-gap energy, deposition rate and surface roughness. Depending on the intended application and therefore desired thin film characteristics, mappings of the experimental design meaningfully help to select suitable deposition parameters.

Aix Marseille Université LISA EA4672 Campus scientifique de Saint Jérôme 13397 Marseille France

BRGM Direction Eau Environnement et Ecotechnologies Unité Bio Géochimie environnementale et qualité de l'Eau 45060 Orléans France

Department of Graphic Arts and Photophysics Faculty of Chemical Technology University of Pardubice Studentska 573 53210 Pardubice Czech Republic

IFREMER Laboratoire Détection Capteurs et Mesures Dpt Recherches et Développements Technologiques 29280 Plouzané France

Institut des matériaux Jean Rouxel UMR 6502 Université de Nantes CNRS 44322 Nantes Cedex 3 France

Institut des Sciences Chimiques de Rennes UMR CNRS 6226 Université de Rennes 1 35042 Rennes France

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