This paper deals with the synthesis and study of the properties of germanium-doped diamond-like carbon (DLC) films. For deposition of doped DLC films, hybrid laser technology was used. Using two deposition lasers, it was possible to arrange the dopant concentrations by varying the laser repetition rate. Doped films of Ge concentrations from 0 at.% to 12 at.% were prepared on Si (100) and fused silica (FS) substrates at room temperature. Film properties, such as growth rate, roughness, scanning electron microscopy (SEM) morphology, wavelength dependent X-ray spectroscopy (WDS) composition, VIS-near infrared (IR) transmittance, and biological properties (cytotoxicity, effects on cellular morphology, and ability to produce reactive oxygen species (ROS)) were studied in relation to codeposition conditions and dopant concentrations. The analysis showed that Ge-DLC films exhibit cytotoxicity for higher Ge doping.

Faculty of Biomedical Engineering Czech Technical University Prague nam Sitna 3105 27 201 Kladno Czech Republic

Faculty of Nuclear Science and Physical Engineering Czech Technical University Prague Brehova 7 115 19 Prague 1 Czech Republic

Institute of Physics of the Czech Academy of Sciences Na Slovance 2 182 21 Prague 8 Czech Republic

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