This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

Brno University of Technology Technicka 3058 10 CZ 616 00 Brno Czech Republic

Center for Nanoscale Materials Argonne National Laboratory Lemont IL 60439 USA

Department of Microsystems Northwestern Polytechnical University Xi'an P R China

Edico Genome La Jolla CA 92037 USA

Harvey Mudd College Claremont CA 91711 USA

National Institute of Standards and Technology Gaithersburg MD 20899 USA

Quattrone Nanofabrication Facility University of Pennsylvania Philadelphia PA 19104 USA

Roche Sequencing Solutions Pleasanton CA 94588 USA

Tel Aviv University School of Mechanical Engineering Ramat Aviv 69978 Tel Aviv Israel

University of Alaska Mechanical Engineering Anchorage AK 99508 USA

University of Maryland Maryland NanoCenter College Park MD 20740 USA

Worcester Polytechnic Institute Mechanical Engineering Worcester MA 01609 USA

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