The paper deals with quantitative phase imaging of two-height-level surface reliefs. The imaging is considered to be a linear system and, consequently, the Fourier transform of the image is the product of the Fourier transform of a 2D function characterizing the surface and a specific 2D coherent transfer function. The Fourier transform of functions specifying periodic surface reliefs is factorized into two functions similar to lattice and structure amplitudes in crystal structure analysis. The approach to the imaging process described in the paper enables us to examine the dependence of the phase image on the surface geometry. Theoretical results are verified experimentally by means of a digital holographic microscope.

Institute of Physical Engineering Faculty of Mechanical Engineering Brno University of Technology Technická 2 616 69 Brno Czech Republic

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