AFM (atomic force microscopy) nanolithography can be used for preparation of nanostructures in various fields such as nanodevices, nanoantenas and biosensors. Several methods of AFM nanolithography (local anodic oxidation, electron resist exposure, dip pen nanolithography and nanoscratching), their advantages and essential properties are described.

• MeSH
• Biomedical Engineering MeSH
• Microscopy, Atomic Force * methods   instrumentation   utilization   MeSH
• Microscopy, Scanning Probe * methods   instrumentation   utilization   MeSH
• Nanostructures MeSH
• Nanotechnology * MeSH
• Publication type
• Research Support, Non-U.S. Gov't MeSH